Display panel manufacturing device and cleaning method

ABSTRACT

The present application discloses a display panel manufacturing device and a cleaning method. The display panel manufacturing device includes: a machine table, a working pipeline, a gas supply means and a liquid supply means; a detection means is provided on the machine table; a first automatic valve is provided on a gas supply pipeline; and a second automatic valve is provided on a liquid supply pipeline.

The present application claims priority to the Chinese PatentApplication No. CN 201811158805.3, filed to the Chinese Patent Office onSep. 30, 2018, and entitled “DISPLAY PANEL MANUFACTURING DEVICE ANDCLEANING METHOD” which is incorporated herein by reference in itsentirety.

TECHNICAL FIELD

The present application relates to the technical field of display, andin particular to a display panel manufacturing device and a cleaningmethod.

BACKGROUND

The statements in this section merely provide background informationrelated to the present application and may not constitute prior art.

Along with the development and progress of science and technology, aLiquid Crystal Display (LCD) has become a mainstream display product andis widely applied because of hot points such as a thin body, powersaving and low radiation. It is known by an inventor that most LCDs arebacklight type LCDs and each LCD includes a liquid crystal panel and abacklight module. A working principle of the liquid crystal panel is toplace liquid crystal molecules into two parallel glass substrates andapply a drive voltage onto the two glass substrates to control rotationdirections of the liquid crystal molecules, thereby refracting lightrays of the backlight module to generate a pattern.

Among them, a Thin Film Transistor-Liquid Crystal Display (TFT-LCD) hasgradually dominated the display field till now because of propertiessuch as low power consumption, excellent pattern quality and highproduction yield. Likewise, the TFT-LCD includes a liquid crystal paneland a backlight module; the liquid crystal panel includes a Color FilterSubstrate (CF-Substrate), a Thin Film Transistor Substrate (TFTSubstrate) and a mask; and a transparent conductive thin film isrespectively provided at opposite insides of the CF substrate and theTFT substrate.

During an LCD manufacturing process, a discharge port or an air outletof some pipeline on a manufacturing device is easily attached by a drugliquid to crystallize and then the discharge port or the air outlet isblocked. As a result, the stability of a display panel manufactureprocedure is seriously affected, the yield of a display panel is reducedand at last the cost is increased.

SUMMARY

The present application provides a display panel manufacturing deviceand a cleaning method to improve the stability of a display panelmanufacture procedure.

To this end, the present application provides a display panelmanufacturing device, which includes:

a machine table, configured to support and deliver a glass substrate;

a working pipeline, arranged in a first direction of the machine tableand configured to convey a material to be acted on the glass substrate;

a gas supply means, communicating with the working pipeline via a gassupply pipeline; and

a liquid supply means, communicating with the working pipeline via aliquid supply pipeline;

where, a detection means configured to detect a state in which the glasssubstrate is delivered on the machine table is provided on the machinetable; a first automatic valve is provided on the gas supply pipeline; asecond automatic valve is provided on the liquid supply pipeline; andthe detection means is coupled with the first automatic valve and thesecond automatic valve.

Optionally, the liquid supply means includes a first liquid supplymeans; the first liquid supply means includes a first liquid inlet and afirst manual valve arranged between the first liquid inlet and thesecond automatic valve; the first liquid inlet and the first manualvalve are arranged on the liquid supply pipeline; and the first liquidsupply means outputs a first feed liquid to the working pipeline via theliquid supply pipeline.

Optionally, the liquid supply means includes a second liquid supplymeans; the second liquid supply means includes a second liquid inlet anda second manual valve arranged between the second liquid inlet and thesecond automatic valve; the second liquid inlet and the second manualvalve are arranged on the liquid supply pipeline; and the second liquidsupply means outputs a second feed liquid to the working pipeline viathe liquid supply pipeline.

Optionally, the gas supply means includes a gas inlet, a pressureregulating valve and a third manual valve; the gas inlet, the pressureregulating valve and the third manual valve are arranged on the gassupply pipeline; the pressure regulating valve is close to the gasinlet; the third manual valve is close to the working pipeline; thefirst automatic valve is located between the pressure regulating valveand the third manual valve; and the gas supply means outputs acompressed gas to the working pipeline via the gas supply pipeline.

Optionally, one side, close to the machine table, of the workingpipeline is provided with an air blade port, a distance from one end,close to the machine table, of the working pipeline to the machine tableis greater than a thickness of the glass substrate; the air blade portis a long stripped opening; directions that the air blade port and theworking pipeline are provided are consistent; and a length of the airblade port is greater than a length of the glass substrate in adirection corresponding to the air blade port, and is smaller than alength of the working pipeline.

Optionally, a distance from one end, close to the machine table, of theworking pipeline to the machine table is greater than a thickness of theglass substrate; a baffle plate for dividing the working pipeline intotwo independent pipelines is arranged inside the working pipeline; theworking pipeline includes a first pipeline and a second pipeline; oneside, close to the machine table, of the first pipeline is provided withan air blade port; one side, close to the machine table, of the secondpipeline is provided with a group of through holes; and the firstpipeline and the second pipeline do not work simultaneously.

To this end, the present application further provides a display panelmanufacturing device, which includes: a machine table, configured tosupport and deliver a glass substrate;

a working pipeline, arranged in a first direction of the machine tableand configured to convey a material to be acted on the glass substrate,where one side, close to the machine table, of the working pipeline isprovided with an air blade port, a distance from one end, close to themachine table, of the working pipeline to the machine table is greaterthan a thickness of the glass substrate, the air blade port is a longstripped opening, directions that the air blade port and the workingpipeline are provided are consistent, and a length of the air blade portis greater than a length of the glass substrate in a directioncorresponding to the air blade port, and is smaller than a length of theworking pipeline;

a gas supply means, communicating with the working pipeline via a gassupply pipeline, where the gas supply means includes a gas inlet, apressure regulating valve, a first automatic valve and a third manualvalve, the gas inlet, the pressure regulating valve, the first automaticvalve and the third manual valve are arranged on the gas supplypipeline, the pressure regulating valve is close to the gas inlet, thethird manual valve is close to the working pipeline, the first automaticvalve is located between the pressure regulating valve and the thirdmanual valve, and the gas supply means outputs a compressed gas to theworking pipeline via the gas supply pipeline; and

a liquid supply means, communicating with the working pipeline via aliquid supply pipeline, where a second automatic valve is arranged onthe liquid supply pipeline;

the liquid supply means includes a first liquid supply means; the firstliquid supply means includes a first liquid inlet and a first manualvalve arranged between the first liquid inlet and the second automaticvalve; the first liquid inlet and the first manual valve are arranged onthe liquid supply pipeline; and the first liquid supply means outputs afirst feed liquid to the working pipeline via the liquid supplypipeline;

the liquid supply means includes a second liquid supply means; thesecond liquid supply means includes a second liquid inlet and a secondmanual valve arranged between the second liquid inlet and the secondautomatic valve; the second liquid inlet and the second manual valve arearranged on the liquid supply pipeline; and the second liquid supplymeans outputs a second feed liquid to the working pipeline via theliquid supply pipeline; and

a detection means configured to detect a state in which the glasssubstrate is delivered on the machine table is provided on the machinetable; and the detection means is coupled with the first automatic valveand the second automatic valve.

To this end, the present application provides a cleaning methodincluding the above-mentioned display panel manufacturing device, whichincludes:

a detection means detects an operating state of a machine table andoutputs a control signal; and

a first automatic valve and a second automatic valve are controlledaccording to the control signal to be opened or closed.

Optionally, the operating state includes a substrate loaded state; andwhen the detection means detects that the machine table is in thesubstrate loaded state, the method that a first automatic valve and asecond automatic valve are controlled according to the control signal tobe opened or closed includes:

the detection means outputs the control signal to the first automaticvalve to open the gas supply means; and

the detection means outputs the control signal to the second automaticvalve to close the liquid supply means;

where, the gas supply means conveys a compressed gas to a workingpipeline; the compressed gas is blown to a surface of the glasssubstrate via an air blade port; and the compressed gas blows off aresidual drug liquid on the glass substrate.

Specifically, the drug liquid includes an etching liquid.

Optionally, the operating state includes a no-load state; and when thedetection means detects that the machine table is in the no-load state,the method that a first automatic valve and a second automatic valve arecontrolled according to the control signal to be opened or closedincludes:

the detection means outputs the control signal to the first automaticvalve to close the gas supply means; and

the detection means outputs the control signal to the second automaticvalve to open the liquid supply means;

where, the first manual valve is in a closed state, the second liquidsupply means conveys a second feed liquid to the working pipeline, thesecond feed liquid is flowed to the machine table from the air bladeport, and the second feed liquid is deionized water.

When a transparent conductive thin film on the glass substrate is etchedwith a wet method, an oxalic acid is used to etch the transparentconductive thin film. Since the oxalic acid is easily crystallized afterbeing reacted with the transparent conductive thin film, after the gassupply means supplies a gas to the working pipeline and when the etchedglass substrate is treated by the gas in the working pipeline, theresidual drug liquid on the glass substrate is splashed easily to beabsorbed to an outlet of the working pipeline and crystallized on theoutlet. As a result, the outlet is blocked and a gas pressure in theblocked working pipeline becomes large, so that a force acted on theglass substrate is large and a photoresist on the glass substrate iseasily fallen off. In the present application, the detection means isprovided, the detection means is coupled with the first automatic valveof the gas supply means and the second automatic valve of the liquidsupply means, and the detection means may control a working state of thefirst automatic valve or the second automatic valve, thereby controllinga working state of the gas supply means or the liquid supply means; whena cleaning liquid is provided to the working pipeline by the liquidsupply means, the machine table and the working pipeline may be cleaned,so that a crystallization velocity on the outlet of the working pipelineis slowed down or crystals on the outlet of the working pipeline areremoved; and therefore, the occurrence of a condition in which theworking pipeline is crystallized is reduced, the photoresist on theglass substrate is reduced to be fallen off, and at last the stabilityof the display panel manufacture procedure is improved and theproduction cost of the display panel is saved.

BRIEF DESCRIPTION OF DRAWINGS

The drawings are included to provide further understanding ofembodiments of the present application, which constitute a part of thespecification and illustrate the embodiments of the present application,and describe the principles of the present application together with thetext description. Apparently, the accompanying drawings in the followingdescription show merely some embodiments of the present application, anda person of ordinary skill in the art may still derive otheraccompanying drawings from these accompanying drawings without creativeefforts. In the accompanying drawings:

FIG. 1 is a schematic diagram of a manufacturing device according to anembodiment of the present application;

FIG. 2 is a schematic diagram of a working pipeline according to anembodiment of the present application;

FIG. 3 is a cross-sectional schematic diagram of a working pipelineaccording to an embodiment of the present application;

FIG. 4 is a cross-sectional schematic diagram of another workingpipeline according to an embodiment of the present application;

FIG. 5 is a schematic diagram of an opening place of a working pipelineaccording to an embodiment of the present application;

FIG. 6 is a cross-sectional schematic diagram of another workingpipeline according to an embodiment of the present application;

FIG. 7 is a flowchart schematic diagram of a cleaning method accordingto an embodiment of the present application; and

FIG. 8 is a flowchart schematic diagram of another cleaning methodaccording to an embodiment of the present application.

DETAILED DESCRIPTION

The specific structure and function details disclosed herein are merelyrepresentative, and are intended to describe exemplary embodiments ofthe present application. However, the present application can bespecifically embodied in many alternative forms, and should not beinterpreted to be limited to the embodiments described herein.

In the description of the present application, it should be understoodthat, orientation or position relationships indicated by the terms“center”, “transversal”, “upper”, “lower”, “left”, “right”, “vertical”,“horizontal”, “top”, “bottom”, “inner”, “outer”, etc. are based on theorientation or position relationships as shown in the drawings, for easeof the description of the present application and simplifying thedescription only, rather than indicating or implying that the indicateddevice or element must have a particular orientation or be constructedand operated in a particular orientation. Therefore, these terms shouldnot be understood as a limitation to the present application. Inaddition, the terms such as “first” and “second” are merely for adescriptive purpose, and cannot be understood as indicating or implyinga relative importance, or implicitly indicating the number of theindicated technical features. Hence, the features defined by “first”,“second” can explicitly or implicitly include one or more of thefeatures. In the description of the present application, “a pluralityof” means two or more, unless otherwise stated. In addition, the term“include” and any variations thereof are intended to cover anon-exclusive inclusion.

In the description of the present application, it should be understoodthat, unless otherwise specified and defined, the terms “install”,“connected with”, “connected to” should be comprehended in a broadsense. For example, these terms may be comprehended as being fixedlyconnected, detachably connected or integrally connected; mechanicallyconnected or coupled; or directly connected or indirectly connectedthrough an intermediate medium, or in an internal communication betweentwo elements. The specific meanings about the foregoing terms in thepresent application may be understood by those skilled in the artaccording to specific circumstances.

The terms used herein are merely for the purpose of describing thespecific embodiments, and are not intended to limit the exemplaryembodiments. As used herein, the singular forms “a”, “an” are intendedto include the plural forms as well, unless otherwise indicated in thecontext clearly. It will be further understood that the terms “comprise”and/or “include” used herein specify the presence of the statedfeatures, integers, steps, operations, elements and/or components, butdo not preclude the presence or addition of one or more other features,integers, steps, operations, elements, components and/or combinationsthereof.

The present application will be further described in combination withthe accompanying drawings and embodiments.

As shown in FIG. 1 to FIG. 3, an embodiment of the present applicationdiscloses a display panel manufacturing device 100, which includes:

a machine table 101, configured to support and deliver a glass substrate102;

a working pipeline 103, arranged in a first direction of the machinetable 101 and configured to convey a material to be acted on the glasssubstrate 102;

a gas supply means 104, communicating with the working pipeline 103 viaa gas supply pipeline 106; and

a liquid supply means 105, communicating with the working pipeline 103via a liquid supply pipeline 107;

where, a detection means 108 configured to detect a state in which theglass substrate 102 is delivered on the machine table 101 is provided onthe machine table 101; a first automatic valve 110 is provided on thegas supply pipeline 106; a second automatic valve 111 is provided on theliquid supply pipeline 107; and the detection means 108 is coupled withthe first automatic valve 110 and the second automatic valve 111. In thepresent application, the first direction is above the machine table.

When a transparent conductive thin film on the glass substrate 102 isetched with a wet method, an oxalic acid is used to etch the transparentconductive thin film. Since the oxalic acid is easily crystallized afterbeing reacted with the transparent conductive thin film, after the gassupply means 104 supplies a gas to the working pipeline 103 and when theetched glass substrate 102 is treated by the gas in the working pipeline103, the residual drug liquid on the glass substrate 102 is splashedeasily to be absorbed to an outlet of the working pipeline 103 andcrystallized on the outlet. As a result, the outlet is blocked and a gaspressure in the blocked working pipeline 103 becomes large, so that aforce acted on the glass substrate 102 is large and a photoresist on theglass substrate 102 is easily fallen off. In the present application,the detection means 108 is provided, the detection means 108 is coupledwith the first automatic valve 110 of the gas supply means 104 and thesecond automatic valve 111 of the liquid supply means 105, and thedetection means 108 may control a working state of the first automaticvalve 110 or the second automatic valve 111, thereby controlling aworking state of the gas supply means 104 or the liquid supply means105; when a cleaning liquid is provided to the working pipeline 103 bythe liquid supply means 105, the machine table 101 and the workingpipeline 103 may be cleaned, so that a crystallization velocity on theoutlet of the working pipeline 103 is slowed down or crystals on theoutlet of the working pipeline 103 are removed; and therefore, theoccurrence of a condition in which the working pipeline 103 iscrystallized is reduced, the photoresist on the glass substrate 102 isreduced to be fallen off, and at last the stability of the display panelmanufacture procedure is improved and the production cost of the displaypanel is saved.

In this embodiment, optionally, the liquid supply means 105 includes afirst liquid supply means 112; the first liquid supply means 112includes a first liquid inlet 113 and a first manual valve 114 arrangedbetween the first liquid inlet 113 and the second automatic valve 111;the first liquid inlet 113 and the first manual valve 114 are arrangedon the liquid supply pipeline 107; and the first liquid supply means 112outputs a first feed liquid 115 to the working pipeline 103 via theliquid supply pipeline 107.

When the second automatic valve 111 receives a signal of the coupleddetection means 108, the first liquid supply means 112 is opened via thesecond automatic valve 111; the first manual valve 114 is arranged onthe liquid supply pipeline 107 and between the first liquid inlet 113and the first manual valve 114; and according to a demand of the workingpipeline 103, the magnitude of a flow of the first feed liquid 115 thatis input to the liquid supply pipeline by the first liquid inlet 113 isregulated by the first manual valve 114.

Specifically, the first liquid supply means 112 is opened to use whenthe machine table 101 is maintained, thereby cleaning the workingpipeline 103 and the machine table 101 simultaneously; and the firstfeed liquid 115 includes a hydrochloric acid or other acidic liquids.

In this embodiment, optionally, one side, close to the machine table101, of the working pipeline 103 is provided with an air blade port 124;a distance from one end, close to the machine table 101, of the workingpipeline 103 to the machine table 101 is greater than a thickness of theglass substrate 102; the air blade port 124 is a long stripped opening;directions that the air blade port 124 and the working pipeline 103 areprovided are consistent; and a length of the air blade port 124 isgreater than a length of the glass substrate 102 in a directioncorresponding to the air blade port 124, and is smaller than a length ofthe working pipeline 103.

The glass substrate 102 moves between the working pipeline 103 and themachine table 101 when the machine table 101 works; and the distancefrom one end, close to the machine table 101, of the working pipeline103 to the machine table 101 should be greater than the thickness of theglass substrate 102 for fear that the glass substrate 102 is blocked orcannot be passed through below the working pipeline 103 to cause thedamage of the glass substrate 102 or the working pipeline 103. Inaddition, the length of the air blade port 124 is greater than that ofthe glass substrate 102 in the direction corresponding to the air bladeport 124, so it may be assured that the glass substrate 102 cancompletely contact the air from the air blade port 124 when passingthrough the working pipeline 103 and that a great deal of drug liquid isprevented from being remained after the glass substrate 102 passesthrough the working pipeline 103 to corrode the photoresist and affect amanufacture procedure of the glass substrate 102. The length of the airblade port 124 should be smaller than that of the working pipeline 103to reduce the idleness. If the length of the air blade port 124 is equalto or is greater than that of the working pipeline 103, most air bladesare idle and a great deal of compressed air is wasted. Besides, theexceeded working pipeline 103 is exposed outside to affect the operationof a worker on a machine, thus reducing the production efficiency

Specifically, the working pipeline 103 is 2 m long and an opening of theair blade port 124 is 2 mm wide.

Referring to FIG. 4 and FIG. 5, the difference from the above embodimentlies in: a distance from one end, close to the machine table 101, of theworking pipeline 103 to the machine table 101 is greater than athickness of the glass substrate 102; a baffle plate 129 for dividingthe working pipeline 103 into two independent pipelines is arrangedinside the working pipeline 103; the working pipeline 103 includes afirst pipeline 125 and a second pipeline 126; one side, close to themachine table 101, of the first pipeline 125 is provided with an airblade port 124; one side, close to the machine table 101, of the secondpipeline 126 is provided with a group of through holes 127; and thefirst pipeline 125 and the second pipeline 126 do not worksimultaneously.

The glass substrate 102 moves between the working pipeline 103 and themachine table 101 when the machine table 101 works; and the distancefrom the end, close to the machine table 101, of the working pipeline103 to the machine table 101 should be greater than the thickness of theglass substrate 102 for fear that the glass substrate 102 is blocked orcannot be passed through to cause the damage of the glass substrate 102or the working pipeline 103. By arranging the baffle plate 129 insidethe working pipeline 103, the working pipeline 103 is divided into twocomponents that are the first pipeline 125 and the second pipeline 126respectively; the first pipeline 125 is provided with the air blade port124; and the second pipeline 126 is provided with the through holes 127.

A main function of the first pipeline 125 is to enable the compressedair 123 provided by the gas supply means 104 to blow away the residualdrug liquid on the glass substrate 102 via the air blade port 124 andprevent the residual drug liquid from being remained on the glasssubstrate 102 to corrode the photoresist or other structures to falloff. A function of the second pipeline 126 is to spray out a liquidprovided by the liquid supply means 105 via the through holes 127. If anetching liquid is provided by the liquid supply means 105, the etchingliquid may be sprayed via the through holes 127 to etch the glasssubstrate 102. If a cleaning liquid is provided by the liquid supplymeans 105, the machine table 101 may be cleaned by the cleaning liquidthat is sprayed out via the through holes 127; and furthermore, theworking pipeline 103 is also cleaned. With the above two pipelines, themultifunction of the working pipeline 103 is implemented; and moreover,the two groups of pipelines are switched to work and do not affect toeach other.

Referring to FIG. 6, the difference from the above embodiment lies in:the working pipeline 103 may further be divided by three baffle plates129 into a first pipeline 125, a second pipeline 126 and a thirdpipeline 128 that do not communicate with each other; the first pipeline125 is provided with a through hole 127, the second pipeline 126 isprovided with an air blade port 124 and the third pipeline 128 isprovided with the air blade port 124 and the through hole 127; theworking pipeline 103 may be rotated with a pipeline center as a center;and according to different demands, the working pipeline 103 may berespectively regulated so that the through hole 127 of the firstpipeline 125 corresponds to the machine table 101, the air blade port124 of the second pipeline 126 corresponds to the machine table 101 orthe through hole 127 and the air blade port 124 of the third pipeline128 correspond to the machine table 101. Therefore, the multifunction ofthe working pipeline 103 is implemented, and the three groups ofpipelines are switched to work and do not affect to each other.

As another embodiment of the present application, referring to FIG. 1,the difference from the above embodiment lies in: the liquid supplymeans 105 further includes a second liquid supply means 116; the secondliquid supply means 116 includes a second liquid inlet 117 and a secondmanual valve 118 arranged between the second liquid inlet 117 and thesecond automatic valve 111; the second liquid inlet 117 and the secondmanual valve 118 are arranged on the liquid supply pipeline 107; and thesecond liquid supply means 116 outputs a second feed liquid 119 to theworking pipeline 103 via the liquid supply pipeline 107.

When the second automatic valve 111 receives a signal of the coupleddetection means 108, the second liquid supply means 116 may further beopened via the second automatic valve 111; the second manual valve 118is arranged on the liquid supply pipeline 107 and between the secondliquid inlet 117 and the second manual valve 111; and according to ademand of the working pipeline 103, the magnitude of a flow of thesecond feed liquid 119 that is input to the liquid supply pipeline bythe second liquid inlet 117 is regulated by the second manual valve 114.

Specifically, the second liquid supply means 116 is opened to use whenthe drug liquid is changed in other working stages of the machine table101 or the glass substrate 102 is still in other working stages, and thesecond feed liquid 119 includes deionized water.

As another embodiment of the present application, referring to FIG. 1,the difference from the above embodiment lies in: the gas supply means104 includes a gas inlet 120, a pressure regulating valve 121 and athird manual valve 122; the gas inlet 120, the pressure regulating valve121 and the third manual valve 122 are arranged on the gas supplypipeline 106; the pressure regulating valve 121 is close to the gasinlet 120; the third manual valve 122 is close to the working pipeline102; the first automatic valve 122 is located between the pressureregulating valve 121 and the third manual valve 122; and the gas supplymeans 102 outputs a compressed gas 123 to the working pipeline 103 viathe gas supply pipeline 106.

When the first automatic valve 110 receives a signal of the coupleddetection means 108, the gas supply means 104 is opened via the firstautomatic valve 110. The pressure regulating valve 121 on the gas supplypipeline 106 is used for regulating a pressure of the compressed gas 123input to the gas supply pipeline from the gas inlet 120, and the thirdmanual valve 122 is used for regulating a flow of the compressed gas 123so that the compressed gas 123 input to the working pipeline 103 meetsthe demand, is sufficient to blow away the residual drug liquid on theglass substrate 102 and can further prevent a photoresist on the glasssubstrate 102 from falling off due to an excessively large air force.

Specifically, the compressed gas 123 includes clean compressed air.

As another embodiment of the present application, referring to FIG. 1 toFIG. 3 the present application discloses a display panel manufacturingdevice 100, which includes:

a machine table 101, configured to support and deliver a glass substrate102;

a working pipeline 103, arranged in a first direction of the machinetable 101 and configured to convey a material to be acted on the glasssubstrate 102, where one side, close to the machine table 101, of theworking pipeline 103 is provided with an air blade port 124; a distancefrom one end, close to the machine table 101, of the working pipeline103 to the machine table 101 is greater than a thickness of the glasssubstrate 102; the air blade port 124 is a long stripped opening;directions that the air blade port 124 and the working pipeline 103 areprovided are consistent; and a length of the air blade port 124 isgreater than a length of the glass substrate 102 in a directioncorresponding to the air blade port 124, and is smaller than a length ofthe working pipeline 103;

a gas supply means 104, communicating with the working pipeline 103 viaa gas supply pipeline 106, where the gas supply means 104 includes a gasinlet 120, a pressure regulating valve 121, a first automatic valve 110and a third manual valve 122, the gas inlet 120, the pressure regulatingvalve 121, the first automatic valve 110 and the third manual valve 122are arranged on the gas supply pipeline 106, the pressure regulatingvalve 121 is close to the gas inlet 120, the third manual valve 122 isclose to the working pipeline 103, the first automatic valve 110 islocated between the pressure regulating valve 121 and the third manualvalve 122, and the gas supply means 104 outputs a compressed gas 123 tothe working pipeline 103 via the gas supply pipeline 106; and

a liquid supply means 105, communicating with the working pipeline 103via a liquid supply pipeline 107, where a second automatic valve 111 isarranged on the liquid supply pipeline 107;

the liquid supply means 105 includes a first liquid supply means 112;the first liquid supply means 112 includes a first liquid inlet 113 anda first manual valve 114 arranged between the first liquid inlet 113 andthe second automatic valve 111; the first liquid inlet 113 and the firstmanual valve 114 are arranged on the liquid supply pipeline 107; and thefirst liquid supply means 112 outputs a first feed liquid 115 to theworking pipeline 103 via the liquid supply pipeline 107;

the liquid supply means 105 includes a second liquid supply means 116;the second liquid supply means 116 includes a second liquid inlet 117and a second manual valve 118 arranged between the second liquid inlet117 and the second automatic valve 111; the second liquid inlet 117 andthe second manual valve 118 are arranged on the liquid supply pipeline107; and the second liquid supply means 116 outputs a second feed liquid119 to the working pipeline 103 via the liquid supply pipeline 107; and

a detection means 108 configured to detect a state in which the glasssubstrate 102 is delivered on the machine table 101 is provided on themachine table 101; and the detection means 108 is coupled with the firstautomatic valve 110 and the second automatic valve 111.

By arranging the detection means 108, an operating state in which theglass substrate 102 is delivered on the machine table 101 is detected.The detection means 108 is coupled with the first automatic valve 110 ofthe gas supply means 104 and the second automatic valve 111 of theliquid supply means 105. According to a detected operating state of themachine table 101, the detection means 108 may control a working stateof the first automatic valve 110 or the second automatic valve 111 bytransmitting a control signal 109 to the first automatic valve 110 orthe second automatic valve 111, thereby controlling a working state ofthe gas supply means 104 or the liquid supply means 105. When a cleaningliquid is provided to the working pipeline 103 by the liquid supplymeans 105, the machine table 101 and the working pipeline 103 may becleaned, so that a crystallization velocity on an outlet of the workingpipeline 103 is slowed down or crystals on the outlet of the workingpipeline 103 are removed; and therefore, the occurrence of a conditionin which the working pipeline 103 is crystallized is reduced, thephotoresist on the glass substrate 102 is reduced to be fallen off, andat last the cost is saved and the stability of the display panelmanufacture procedure is improved.

When the first automatic valve 110 receives a signal of the coupleddetection means 108, the gas supply means 104 is opened via the firstautomatic valve 110. The pressure regulating valve 121 on the gas supplypipeline 106 is used for regulating a pressure of the compressed gas 123input to the gas supply pipeline from the gas inlet 120, and the thirdmanual valve 122 is used for regulating a flow of the compressed gas 123so that the compressed gas 123 input to the working pipeline 103 meetsthe demand, is sufficient to blow away the residual drug liquid on theglass substrate 102 and can further prevent a photoresist on the glasssubstrate 100 from falling off due to an excessively large air force.

When the second automatic valve 111 receives a signal of the coupleddetection means 108, the first liquid supply means 112 is opened via thesecond automatic valve 111. The first manual valve 114 is arranged onthe liquid supply pipeline 107 and between the first liquid inlet 113and the first manual valve 114. According to a demand of the workingpipeline 103, the magnitude of a flow of the first feed liquid 115 thatis input to the liquid supply pipeline by the first liquid inlet 113 isregulated by the first manual valve 114. The first feed liquid 115includes a hydrochloric acid solution or other acidic solutions. Afterthe first feed liquid 115 gets out of the air blade port 124, thecleaning on the machine table 101 is implemented and the cleaning on theworking pipeline 103 and the air blade port 101 in itself is alsoimplemented. Therefore, an air outlet is prevented from being blocked bydrug crystals splashed and attached on the glass substrate 102 to changean air-out direction of the air blade port 124 and an air force appliedto the glass substrate 102, the normal work of the working pipeline 103is guaranteed and a structure including the photoresist on the glasssubstrate 102 is prevented from being damaged.

When the second automatic valve 111 receives the signal of the coupleddetection means 108, the second liquid supply means 116 may further beopened via the second automatic valve 111. The second manual valve 118is arranged on the liquid supply pipeline 107 and between the secondliquid inlet 117 and the second manual valve 111. According to thedemand of the working pipeline 103, the magnitude of the flow of thesecond feed liquid 119 that is input to the liquid supply pipeline bythe second liquid inlet 117 is regulated by the second manual valve 114.The second feed liquid 119 includes deionized water. By charging thedeionized water to the working pipeline 103, a drug crystallization timeon the air blade port 124 may be alleviated, and the occurrence of acrystallization condition is reduced.

Specifically, a temperature of the deionized water is 35° C. to 45° C.The effect of alleviating the drug crystallization is the best when thetemperature of the deionized water is 40° C.

As another embodiment of the present application, referring to FIG. 7 toFIG. 8 the present application discloses a cleaning method including thedisplay panel manufacturing device 100, which includes:

S100: a detection means 108 detects an operating state of a machinetable 101 and outputs a control signal 109.

S200: a first automatic valve 110 and a second automatic valve 111 arecontrolled according to the control signal 109 to be opened or closed.

By detecting the operating state of the machine table 101 and outputtingthe control signal 109 to control the first automatic valve 110 and thesecond automatic valve 111 to be opened or closed, the automatic controlis implemented, the manpower investment is reduced, and the productioncost is saved.

In this embodiment, optionally, the operating state includes a substrateloaded state; and when the detection means 108 detects that the machinetable 101 is in the substrate loaded state, the method that a firstautomatic valve 110 and a second automatic valve 111 are controlledaccording to the control signal 109 to be opened or closed includesS300:

the detection means 108 outputs the control signal 109 to the firstautomatic valve 110 to open the gas supply means 104; and

the detection means 108 outputs the control signal 109 to the secondautomatic valve 111 to close the liquid supply means 105;

where, the gas supply means 104 conveys a gas to a working pipeline 103;the gas is blown to a surface of the glass substrate 102 via an airblade port 124; and the gas blows off a residual drug liquid on theglass substrate 102. The drug liquid includes an etching liquid.

The machine table 101 delivers the glass substrate 102 to a seconddirection of the working pipeline 103 in the substrate loaded state. Atthis moment, the residual drug liquid after etching is on the glasssubstrate 102, so it is necessary to provide a compressed gas 123 viathe gas supply means 104 to blow the surface of the substrate 102 and toremove the residual drug liquid. Therefore, the detection means 108needs to output the control signal 109 to the first automatic valve 110to open the gas supply means 104, and simultaneously output the controlsignal 109 to the second automatic valve 111 to close the liquid supplymeans 105 at this moment. In the present application, the seconddirection is below the working pipeline.

In this embodiment, optionally, the operating state includes a no-loadstate; and when the detection means 108 detects that the machine table101 is in the no-load state, the method that a first automatic valve 110and a second automatic valve 111 are controlled according to the controlsignal 109 to be opened or closed includes S400:

the detection means 108 outputs the control signal 109 to the secondautomatic valve 110 to close the gas supply means 104; and

the detection means 108 outputs the control signal 109 to the secondautomatic valve 111 to open the liquid supply means 105;

where, the first manual valve 114 is in a closed state, the secondliquid supply means 116 conveys a second feed liquid 119 to the workingpipeline 103, the second feed liquid 119 is flowed to the machine table101 from the air blade port 124, and the second feed liquid 119 isdeionized water.

There is no movement of the glass substrate 102 in the second directionof the working pipeline 103 in the no-load state, because the foregoingresidual drug liquid in treatment of the glass substrate 102 is splashedon the air blade port 124 of the working pipeline 103. As the drugliquid is crystallized easily, by inputting the deionized water to theworking pipeline 103 via the liquid supply means 105, thecrystallization time of the drug liquid on the air blade port 124 may beslowed down, and the occurrence of the crystallization condition isreduced. Therefore, it is necessary to output the control signal 109 tothe first automatic valve 110 to close the gas supply means 104 in theno-load state; and meanwhile, the detection means 108 outputs thecontrol signal 109 to the second automatic valve 111 to open the liquidsupply means 105.

In this embodiment, optionally, the machine table 101 needs to bemaintained at intervals; and when the machine table 101 is maintained,the method that a first automatic valve 110 and a second automatic valve111 are controlled according to the control signal 109 to be opened orclosed includes S400:

the detection means 108 outputs the control signal 109 to the secondautomatic valve 110 to close the gas supply means 104; and

the detection means 108 outputs the control signal 109 to the secondautomatic valve 111 to open the liquid supply means 105;

where, the second manual valve 118 is in a closed state, the firstliquid supply means 112 conveys a first feed liquid 115 to the workingpipeline 103, the first feed liquid 115 is flowed to the machine table101 from the air blade port 124, and the first feed liquid 115 is ahydrochloric acid solution or other acidic solutions.

There is no movement of the glass substrate 102 in the second directionof the working pipeline 103 when the machine table 101 is maintained,because the foregoing residual drug liquid in treatment of the glasssubstrate 102 is splashed on the air blade port 124 of the workingpipeline 103 to crystallize. The crystals seriously affect an air-outdirection of the air blade port 124 and a blowing force to the surfaceof the glass substrate 102, and are easy to cause that the residual drugliquid on the glass substrate 102 is not removed completely or that thephotoresist on the glass substrate 102 is fallen off, so it is essentialto remove the crystals on the air blade port 124. By conveying thehydrochloric acid solution or the other acidic solutions to the workingpipeline 103 via the first liquid supply means 112, the crystals may beeffectively removed and the normal work of the air blade port 124 isguaranteed.

Specifically, the first liquid supply means 112 do not need to beprovided additionally. When the machine table 101 is maintained, thefirst liquid supply means 112 is adopted to clean the machine table 101.Therefore, in this embodiment, the first liquid supply means 112 isadopted to clean the working pipeline 103 and the air blade port 124without additional equipment investment, and thus the production cost issaved.

In the present application, the panel may be a Twisted Nematic (TN)panel, an In-Pane Switching (IPS) panel and a Multi-domain VerticalAlignment (VA) panel, and of course, may also be other types ofapplicable panels.

The above are further detailed descriptions of the present applicationin combination with specific preferred implementation manners and shouldnot be deemed as that the specific implementation of the presentapplication is only limited to these descriptions. A person of ordinaryskill in the art to which the present invention belongs may further makea plurality of simple deviations or replacements without departing fromthe concept of the present invention and all should be considered as ascope of protection of the present invention.

What is claimed is:
 1. A display panel manufacturing device, comprising:a machine table, configured to support and deliver a glass substrate; aworking pipeline, arranged in a first direction of the machine table andconfigured to convey a material to be acted on the glass substrate; agas supply means, communicating with the working pipeline via a gassupply pipeline; and a liquid supply means, communicating with theworking pipeline via a liquid supply pipeline, wherein a detection meansconfigured to detect a state in which the glass substrate is deliveredon the machine table is provided on the machine table; a first automaticvalve is provided on the gas supply pipeline; a second automatic valveis provided on the liquid supply pipeline; and the detection means iscoupled with the first automatic valve and the second automatic valve.2. The display panel manufacturing device according to claim 1, whereinthe liquid supply means comprises a first liquid supply means; the firstliquid supply means comprises a first liquid inlet and a first manualvalve arranged between the first liquid inlet and the second automaticvalve; the first liquid inlet and the first manual valve are arranged onthe liquid supply pipeline; and the first liquid supply means outputs afirst feed liquid to the working pipeline via the liquid supplypipeline.
 3. The display panel manufacturing device according to claim1, wherein the liquid supply means comprises a second liquid supplymeans; the second liquid supply means comprises a second liquid inletand a second manual valve arranged between the second liquid inlet andthe second automatic valve; the second liquid inlet and the secondmanual valve are arranged on the liquid supply pipeline; and the secondliquid supply means outputs a second feed liquid to the working pipelinevia the liquid supply pipeline.
 4. The display panel manufacturingdevice according to claim 1, wherein the gas supply means includes a gasinlet, a pressure regulating valve and a third manual valve; the gasinlet, the pressure regulating valve and the third manual valve arearranged on the gas supply pipeline; the pressure regulating valve isclose to the gas inlet; the third manual valve is close to the workingpipeline; the first automatic valve is located between the pressureregulating valve and the third manual valve; and the gas supply meansoutputs a compressed gas to the working pipeline via the gas supplypipeline.
 5. The display panel manufacturing device according to claim1, wherein one side, close to the machine table, of the working pipelineis provided with an air blade port; a vertical distance from one end,close to the machine table, of the working pipeline to the machine tableis greater than a thickness of the glass substrate; the air blade portis a long stripped opening; directions that the air blade port and theworking pipeline are provided are consistent; and a length of the airblade port is greater than a length of the glass substrate in adirection corresponding to the air blade port, and is smaller than alength of the working pipeline.
 6. The display panel manufacturingdevice according to claim 1, wherein a vertical distance from one end,close to the machine table, of the working pipeline to the machine tableis greater than a thickness of the glass substrate; a baffle plate fordividing the working pipeline into two independent pipelines is arrangedinside the working pipeline; the working pipeline comprises a firstpipeline and a second pipeline; one side, close to the machine table, ofthe first pipeline is provided with an air blade port; one side, closeto the machine table, of the second pipeline is provided with a group ofthrough holes; and the first pipeline and the second pipeline areswitched to work.
 7. A display panel manufacturing device, comprising: amachine table, configured to support and deliver a glass substrate; aworking pipeline, arranged in a first direction of the machine table andconfigured to convey a material to be acted on the glass substrate,wherein one side, close to the machine table, of the working pipeline isprovided with an air blade port, a distance from one end, close to themachine table, of the working pipeline to the machine table is greaterthan a thickness of the glass substrate, the air blade port is a longstripped opening, directions that the air blade port and the workingpipeline are provided are consistent, and a length of the air blade portis greater than a length of the glass substrate on a directioncorresponding to the air blade port, and is smaller than a length of theworking pipeline; a gas supply means, communicating with the workingpipeline via a gas supply pipeline, wherein the gas supply meansincludes a gas inlet, a pressure regulating valve, a first automaticvalve and a third manual valve, the gas inlet, the pressure regulatingvalve, the first automatic valve and the third manual valve are arrangedon the gas supply pipeline, the pressure regulating valve is close tothe gas inlet, the third manual valve is close to the working pipeline,the first automatic valve is located between the pressure regulatingvalve and the third manual valve, and the gas supply means outputs acompressed gas to the working pipeline via the gas supply pipeline; anda liquid supply means, communicating with the working pipeline via aliquid supply pipeline, wherein a second automatic valve is arranged onthe liquid supply pipeline; the liquid supply means comprises a firstliquid supply means; the first liquid supply means comprises a firstliquid inlet and a first manual valve arranged between the first liquidinlet and the second automatic valve; the first liquid inlet and thefirst manual valve are arranged on the liquid supply pipeline; and thefirst liquid supply means outputs a first feed liquid to the workingpipeline via the liquid supply pipeline; the liquid supply meanscomprises a second liquid supply means; the second liquid supply meanscomprises a second liquid inlet and a second manual valve arrangedbetween the second liquid inlet and the second automatic valve; thesecond liquid inlet and the second manual valve are arranged on theliquid supply pipeline; and the second liquid supply means outputs asecond feed liquid to the working pipeline via the liquid supplypipeline; and a detection means configured to detect a state in whichthe glass substrate is delivered on the machine table is provided on themachine table; and the detection means is coupled with the firstautomatic valve and the second automatic valve.
 8. A cleaning methodapplied to a display panel manufacturing device, the display panelmanufacturing device comprising: a machine table, configured to supportand deliver a glass substrate; a working pipeline, arranged in a firstdirection of the machine table and configured to convey a material to beacted on the glass substrate; a gas supply means, communicating with theworking pipeline via a gas supply pipeline; and a liquid supply means,communicating with the working pipeline via a liquid supply pipeline,wherein a detection means configured to detect a state in which theglass substrate is delivered on the machine table is provided on themachine table; a first automatic valve is provided on the gas supplypipeline; a second automatic valve is provided on the liquid supplypipeline; and the detection means is coupled with the first automaticvalve and the second automatic valve; and the cleaning method comprises:detecting, by a detection means, an operating state of a machine tableand outputting a control signal; and controlling a first automatic valveand a second automatic valve according to the control signal to beopened or closed.
 9. The cleaning method applied to the display panelmanufacturing device according to claim 8, wherein the liquid supplymeans comprises a first liquid supply means; the first liquid supplymeans comprises a first liquid inlet and a first manual valve arrangedbetween the first liquid inlet and the second automatic valve; the firstliquid inlet and the first manual valve are arranged on the liquidsupply pipeline; and the first liquid supply means outputs a first feedliquid to the working pipeline via the liquid supply pipeline.
 10. Thecleaning method applied to the display panel manufacturing deviceaccording to claim 8, wherein the liquid supply means comprises a secondliquid supply means; the second liquid supply means comprises a secondliquid inlet and a second manual valve arranged between the secondliquid inlet and the second automatic valve; the second liquid inlet andthe second manual valve are arranged on the liquid supply pipeline; andthe second liquid supply means outputs a second feed liquid to theworking pipeline via the liquid supply pipeline.
 11. The cleaning methodapplied to the display panel manufacturing device according to claim 8,wherein the gas supply means includes a gas inlet, a pressure regulatingvalve and a third manual valve; the gas inlet, the pressure regulatingvalve and the third manual valve are arranged on the gas supplypipeline; the pressure regulating valve is close to the gas inlet; thethird manual valve is close to the working pipeline; the first automaticvalve is located between the pressure regulating valve and the thirdmanual valve; and the gas supply means outputs a compressed gas to theworking pipeline via the gas supply pipeline.
 12. The cleaning methodapplied to the display panel manufacturing device according to claim 8,wherein one side, close to the machine table, of the working pipeline isprovided with an air blade port; a vertical distance from one end, closeto the machine table, of the working pipeline to the machine table isgreater than a thickness of the glass substrate; the air blade port is along stripped opening; directions that the air blade port and theworking pipeline are provided are consistent; and a length of the airblade port is greater than a length of the glass substrate in adirection corresponding to the air blade port, and is smaller than alength of the working pipeline.
 13. The cleaning method applied to thedisplay panel manufacturing device according to claim 8, wherein avertical distance from one end, close to the machine table, of theworking pipeline to the machine table is greater than a thickness of theglass substrate; a baffle plate for dividing the working pipeline intotwo independent pipelines is arranged inside the working pipeline; theworking pipeline comprises a first pipeline and a second pipeline; oneside, close to the machine table, of the first pipeline is provided withan air blade port; one side, close to the machine table, of the secondpipeline is provided with a group of through holes; and the firstpipeline and the second pipeline are switched to work.
 14. The cleaningmethod applied to the display panel manufacturing device according toclaim 8, wherein the operating state includes a substrate loaded state;and when the detection means detects that the machine table is in thesubstrate loaded state, the method of controlling a first automaticvalve and a second automatic valve according to the control signal to beopened or closed comprises: outputting, by the detection means, thecontrol signal to the first automatic valve to open the gas supplymeans; and outputting, by the detection means, the control signal to thesecond automatic valve to close the liquid supply means, wherein the gassupply means conveys a compressed gas to a working pipeline; thecompressed gas is blown to a surface of the glass substrate via an airblade port; and the compressed gas blows off a residual drug liquid onthe glass substrate.
 15. The cleaning method applied to the displaypanel manufacturing device according to claim 8, wherein the operatingstate includes a no-load state; and when the detection means detectsthat the machine table is in the no-load state, the method ofcontrolling a first automatic valve and a second automatic valveaccording to the control signal to be opened or closed comprises:outputting, by the detection means, the control signal to the firstautomatic valve to close the gas supply means; and outputting, by thedetection means, the control signal to the second automatic valve toopen the liquid supply means, wherein the first manual valve is in aclosed state, the second liquid supply means conveys a second feedliquid to the working pipeline, the second feed liquid is flowed to themachine table from the air blade port, and the second feed liquid isdeionized water.
 16. The cleaning method applied to the display panelmanufacturing device according to claim 14, wherein the drug liquidcomprises an etching liquid.
 17. The cleaning method applied to thedisplay panel manufacturing device according to claim 14, wherein thecompressed gas comprises compressed air.